Precision Engineering for
Purity and Performance
Semiconductor performance begins with process cleanliness.
Every wafer, surface, and oxide layer depends on systems that deliver precise control of gas and water purity.
At Inquivix Technologies, we design and supply clean-process solutions that meet the exact standards required by advanced fabs, from hydrogen and ozone generation to ultrapure water purification and delivery.
Purpose-Built for Semiconductor Applications
Our systems are engineered for the critical cleaning and oxidation processes that define semiconductor quality.
Each solution is developed for high stability, low contamination, and continuous operation under demanding fab conditions.
Whether for wafer reduction, oxidation, or final rinse, our equipment ensures uniform results that directly improve yield and reliability.
Integrated Approach to Process Control
We focus on the full process cycle, including gas generation, delivery, monitoring, and waste reduction.
Our engineering teams work with fabs and integration partners to ensure optimal flow control, consistent purity levels, and seamless compatibility with existing process tools.
This integrated approach minimizes downtime, improves repeatability, and supports compliance with SEMI and Korean industry standards.
Aligned with
Future Technology Nodes
As the industry advances toward AI, high-bandwidth memory, and sub-5nm logic devices, process control requirements become increasingly demanding.
Inquivix Technologies supports these developments with scalable, high-precision systems designed to deliver clean gases and water at the purity levels required for future generations of semiconductor manufacturing.
Hydrogen Generation Systems for
Semiconductor Manufacturing
Hydrogen is essential to the semiconductor industry for oxidation, reduction, and annealing processes.
Inquivix Technologies supplies high-purity hydrogen generation systems engineered to deliver stable gas output, precise flow control, and consistent purity levels required for next-generation semiconductor fabrication.
Each system is optimized for long-term reliability and integration within high-volume manufacturing environments.
High-Purity Hydrogen for Clean and Consistent Processes
Our hydrogen systems achieve a purity of 99.9999 percent and maintain a stable output under continuous operation.
The design ensures low moisture content, minimal impurities, and uniform pressure control across process lines.
These features reduce oxidation defects, helping fabs maintain yield targets for advanced node technologies.
Key Features and Advantages
Semiconductor Process Applications
Our hydrogen systems are used in:
Our hydrogen generators are built to meet Korean industrial safety standards and SEMI process requirements, ensuring full compliance and operational confidence for local fabs and international partners.
Integration and Support
We provide complete technical integration, including installation, calibration, and maintenance programs for Korean fabs and research facilities.
Inquivix Technologies ensures that each hydrogen system performs with consistent purity and safety over its whole operating life.
Reliability and Process Performance
Each hydrogen system from Inquivix Technologies is designed for consistent output and long-term operational stability.
By ensuring precise purity control, automated monitoring, and safety integration, we help semiconductor fabs maintain high throughput and minimize process variability.
Our systems are trusted by engineering teams focused on improving wafer yield and process reliability under demanding production conditions.
Ozone Generation Systems for Semiconductor Cleaning and Oxidation
Ozone plays a central role in semiconductor cleaning and oxidation processes.
Inquivix Technologies designs and supplies high-concentration ozone generators optimized for wafer surface preparation, organic residue removal, and advanced oxidation applications.
Our systems enable fabs to replace harsh chemicals with a cleaner, more sustainable solution that achieves superior surface quality and process consistency.
Advanced Ozone Technology for High Purity Applications
Our ozone systems are engineered to deliver stable, high-purity ozone at concentrations up to 200 g/m³, with options for nitrogen-free (N₂-less) configurations.
These designs ensure a pure oxidation environment, eliminating nitrogen-related impurities that can compromise the uniformity of the oxide layer.
The result is cleaner wafer surfaces and improved control over film growth during oxidation.
Key Features and Performance Advantages
Semiconductor Process Applications
Inquivix Technologies’ ozone systems are applied in:
Each installation is optimized for throughput, process control, and alignment with fab-specific cleaning recipes.
All systems are thoroughly verified through rigorous quality checks and calibrated to meet the stringent requirements of advanced Korean and global fabs.
Cleaner Processing and Sustainable Operation
Ozone replaces traditional acid-based cleaning methods with an environmentally neutral process that minimizes chemical waste and water contamination.
This approach supports ESG goals, reduces operational costs, and aligns with the semiconductor industry’s move toward green manufacturing and zero-discharge production.
Performance You Can Measure
Our ozone systems are proven to reduce chemical use by up to 40 percent and particle defects by over 25 percent in qualifying processes.
By improving wafer surface purity and process uniformity, fabs can achieve measurable yield improvements and longer tool uptime.
Inquivix Technologies provides the systems, integration, and support required to maintain consistent ozone performance in critical applications.
Ultrapure Water Systems for Semiconductor
Cleaning and Rinsing
Water is the most critical cleaning medium in semiconductor manufacturing.
Inquivix Technologies provides ultrapure water (UPW) systems engineered to deliver consistent resistivity, ultra-low particle concentration, and stable flow for wafer cleaning and rinsing processes.
Our systems are designed for fabs that demand precision, repeatability, and contamination-free performance across every cleaning stage.
Consistent Water Purity for
Every Process Step
Each ultrapure water system maintains resistivity levels, ensuring a stable and clean environment for wafer processing.
The systems incorporate multi-stage filtration, degasification, and continuous monitoring to remove ions, particles, and organic contaminants.
This level of purity supports oxidation, wet cleaning, and final rinse steps, directly improving wafer surface integrity and yield consistency.
Key Features and Technical
Advantages
Semiconductor Process Applications
Our ultrapure water systems are applied across multiple wafer cleaning stages, including:
Each system is custom-engineered to align with fab utilities, process flow, and chemical compatibility requirements. Every system undergoes full qualification under Korean and SEMI environmental standards to ensure consistent operation and safe integration into advanced manufacturing lines.
Sustainable Water Management
Built for Long-Term Reliability
Durability and uptime are central to our water system design.
We use corrosion-resistant materials, redundant monitoring units, and smart controls to ensure consistent operation even under variable process loads.
Our maintenance programs and on-site technical support allow fabs to sustain long-term purity performance with minimal downtime.
Process Integration and Technical Support
Inquivix Technologies delivers more than equipment, providing end-to-end process integration and technical support to ensure that every system performs at the highest level of reliability, purity, and safety.
Our engineering teams collaborate closely with fabs, research facilities, and global suppliers to ensure alignment with semiconductor-grade standards for installation, operation, and maintenance.
Seamless System Integration
We specialize in integrating hydrogen, ozone, and ultrapure water systems into existing fab infrastructures.
Our engineers work closely with facility teams to verify line compatibility, control sequencing, and ensure safety compliance.
This ensures a smooth start-up, stable operation, and full synchronization with process tools and utilities.
Every integration project is executed using documented procedures that adhere to SEMI and Korean industrial standards.
Pilot Line Integration
Many of Korea’s leading research facilities rely on pilot-scale process lines to validate new wafer cleaning and oxidation methods before mass adoption.
Our compact hydrogen and ozone generators are designed for lab-scale operation while maintaining the same performance, flow stability, and purity levels as production-grade systems.
This allows researchers to conduct controlled trials, test new materials, and simulate cleanroom environments with accuracy and repeatability.
Process Development and Validation
Inquivix Technologies supports R&D programs that focus on new cleaning recipes, oxidation control, and water treatment innovations.
Our engineering team collaborates with researchers to design customized systems that meet specific flow, concentration, and monitoring requirements.
We also provide integration with laboratory data acquisition systems, ensuring precise measurement and repeatable validation results.
Flexible Design and Safety Compliance
Each R&D system is engineered with configurable parameters for gas flow, concentration, and water purity, allowing maximum experimental flexibility.
All units comply with Korean Industrial Safety Standards, SEMI guidelines, and institutional laboratory safety codes.
This ensures safe operation in controlled environments while providing the same reliability as our industrial systems.
Enabling Korea’s Innovation Ecosystem
Korea’s semiconductor and materials research network continues to expand, driven by government initiatives and industry collaboration.
Inquivix Technologies supports this ecosystem by providing the tools and technical partnership needed to advance clean-process development.
From concept to pilot to production, our systems help researchers accelerate discovery and bring next-generation process technologies to life.
Why Choose Inquivix Technologies
Semiconductor manufacturing demands precision, consistency, and absolute reliability.
Inquivix Technologies provides clean-process systems and local expertise that global partners trust to deliver results. Our team combines Korean engineering excellence with international process understanding to ensure that every project achieves technical performance, operational efficiency, and long-term stability.
Local Expertise and Global Standards
We operate within Korea’s semiconductor production clusters, providing direct access to fabs, EPCs, and research centers.
This proximity enables faster installation, immediate technical support, and a deeper understanding of process requirements. Our international partnerships and bilingual team ensure seamless collaboration between global manufacturers and local engineering teams.
Proven Reliability and Technical Standards
All Inquivix Technologies systems are verified under strict quality assurance programs and comply with SEMI, ISO, and Korean safety certifications.
Our equipment delivers stable output, consistent purity, and robust safety control, meeting the standards demanded by advanced-node fabrication facilities.
We emphasize documentation integrity, system traceability, and process repeatability in every project.
Engineering Precision and Process Control
Each hydrogen, ozone, and ultrapure water system is engineered with fine-tuned instrumentation, real-time monitoring, and modular architecture for easy scaling.
This attention to engineering detail ensures that clients can maintain yield stability, reduce maintenance downtime, and extend the lifespan of their equipment.
Our integrated control systems provide predictable performance across multiple production shifts and varying process loads.
Sustainable and Future-Ready Systems
Our clean-process solutions directly support ESG objectives and sustainable manufacturing.
By reducing chemical dependency and water waste, we help fabs minimize their environmental footprint while maintaining productivity.
Every system is built with the future in mind, ensuring it is scalable, energy-efficient, and compatible with next-generation semiconductor processes.
Partnership and Long-Term Support
We build relationships, not transactions.
From the first consultation to long-term system optimization, our approach is transparent, collaborative, and performance-driven. Clients and partners choose Inquivix Technologies because we respond quickly, communicate clearly, and deliver on every commitment.
Our goal is simple: to become your trusted partner in Korea’s semiconductor industry.
A Trusted Name in Semiconductor Process Technology
Inquivix Technologies continues to strengthen its position as a strategic process technology partner for global companies entering or operating in the Korean market.
Through clean systems, engineering integrity, and commitment to excellence, we provide the foundation for cleaner wafers, higher yields, and more efficient semiconductor production.
Partner With Korea’s Semiconductor
Process Experts
Inquivix Technologies helps global semiconductor companies establish their presence and operate effectively within Korea’s advanced semiconductor ecosystem.
We specialize in clean-process systems, including hydrogen, ozone, and ultrapure water, that improve wafer quality, process consistency, and sustainability.
If your goal is to enhance semiconductor manufacturing through cleaner, more reliable technologies, we are ready to collaborate.
Work With a Trusted Local Partner
We understand the challenges global technology companies face when entering or expanding in Korea.
Our bilingual engineering and business development teams provide the support, compliance guidance, and technical communication necessary for smooth market integration.
We represent select international partners through exclusive distribution, localization, and process qualification programs tailored to the Korean semiconductor industry.
Let’s Start the Conversation
We welcome partnership discussions with:
Semiconductor equipment and process technology manufacturers
Fab and R&D facility managers
Distributors and system integrators seeking local cooperation
Our process begins with a clear assessment of your goals, technology requirements, and project scope to ensure alignment from the start.
Contact Information
Head Office
G-26 E-dong 802, 30 Songdomirae-ro, Yeonsu-gu, Incheon, Korea 21990
Email
[email protected]
Phone
+82 070-8058-9961
Website
www.inquivixtech.com
Business hours
Monday – Friday, 9:00 AM – 6:00 PM (KST)
Our Commitment
Every collaboration with Inquivix Technologies is guided by precision, professionalism, and transparency. We focus on building trust, ensuring technical success, and supporting long-term growth for every partner. Your innovation deserves a reliable foundation — and our clean-process systems are built to provide exactly that.