Achieve high-purity ozone concentration and flexible process control with Inquivix Technologies’ Ozone Gas Generators. Designed for efficiency and high performance, these generators are revolutionizing industrial applications.
Harness the power of ozone with our state-of-the-art ozone generators. Inquivix Technologies’ industrial ozone generators are expertly engineered to intake dry air or concentrated oxygen, delivering significant ozone concentration for complex industrial applications. Widely adopted across the semiconductor industry, our ozone generators meet various demands, from film formation and lithography to dry cleaning and much more. With high flow rates and a compact design, the Inquivix Technologies ozone generator integrates seamlessly into any facility, ensuring space efficiency without compromising performance. Beyond semiconductor applications, our ozone generators are extensively used in sterilizing medical equipment, water treatment, and material processing across a range of manufacturing industries, a testament to their versatility and robustness.

Our Ozone Gas Generators are meticulously engineered to deliver unparalleled high ozone concentrations of up to 300g O3/Nm3 in the gas phase while ensuring minimal oxygen consumption. Our generators are designed to not just meet but exceed industry standards, with an ozone concentration surpassing 335g/Nm3 or 21.7wt% at 5°C. An impressive O2 flow rate ranging from 5slm to 40slm provides exceptional process flexibility, catering to a broad spectrum of industrial needs. The secret behind our high-concentration ozone production lies in our patented cell internal structure design. This innovative feature allows our generators to produce reliable, consistent, highly concentrated ozone output, revolutionizing industries’ operations.
Technical Specifications

Industrial Applications
Semiconductor Manufacturing
Precision and reliability are crucial in semiconductor manufacturing. Ozone Gas Generators play a pivotal role in a variety of critical processes. They assist in film-forming processes, providing a controlled ozone supply to create thin films of material with exceptional uniformity. In lithography, the generators aid in producing high-resolution patterns for microchip fabrication. Plus, for dry cleaning operations, our ozone generators ensure an effective and environmentally friendly cleaning process, eliminating contaminants without leaving any residues.
Ozone Water Generation
Ozone Water (DIO3) production is crucial in many industries, from industrial cleaning and wastewater treatment to food and beverage manufacturing. Inquivix Technologies’ Ozone Gas Generators ensure a reliable supply of high-concentration ozone, enabling efficient generation of DIO3. This optimizes processes like disinfection, oxidation, and color removal, assuring safer and cleaner water for various applications.
Medical Industry
Sterility is vital within the medical industry. That’s where Inquivix Technologies’ Ozone Gas Generators come into play. They are ideal for sterilizing medical equipment because they are known for their exceptional ozone delivery. Our generators ensure maximum destruction of bacteria, viruses, and other micro-organisms, promising a safe and sterile environment. As a result, healthcare providers can guarantee a higher standard of care for patients with the utmost confidence.
Explore our other functional water systems, each providing unique properties to cater to distinct needs.

Hydrogen Gas Generators
FAQs
Ozone, also known as O3, is produced through a fascinating process. It all starts with diatomic oxygen (O2), the type of oxygen we typically breathe. When O2 is exposed to high energy environments such as an electrical field or ultraviolet (UV) light, the energy causes some of the O2 molecules to break apart into individual oxygen atoms. These lone oxygen atoms can then bond with unbroken O2 molecules, creating ozone (O3).
An ozone generator is a device meticulously engineered to create ozone, or O3, from regular oxygen, or O2. It does this by applying a high electrical charge to oxygen molecules, which causes them to separate into individual atoms. These atoms can then recombine with intact oxygen molecules, leading to the formation of ozone.
Ozone generators have a wide range of applications across numerous industries, extending well beyond their use in air cleaners for domestic settings. In the semiconductor manufacturing industry, ozone generators play a critical role in film-forming processes, lithography, and component dry cleaning, contributing to the precision and reliability of the end products. Ozone is also used in certain processes in the battery manufacturing industry. Its potent oxidizing properties make it a valuable asset in this field. Ozone is used to sterilize medical appliances. Its ability to neutralize bacteria and other pathogens makes it an excellent choice for maintaining the safety and cleanliness of medical equipment. Furthermore, ozone generators have proven instrumental in the water treatment industry. They help disinfect water, break down harmful chemicals, and eliminate odors, thus ensuring the safety of the water we use and consume.
Ozone possesses a distinctive smell that is often described as being somewhat similar to chlorine bleach. It’s a pungent, unmistakable odor that can be hard to forget once you’ve encountered it. The fascinating part is that individual humans can greatly vary in their ability to detect the smell of ozone. Some people have a highly attuned sense of smell and can detect ozone at levels as low as 0.05 parts per million (ppm). So, while your ability to sense it may depend on your personal olfactory sensitivity, the scent of ozone is typically quite recognizable for those who have encountered it before.